发明名称 |
Apparatus and method for producing microcomponents and use of |
摘要 |
An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.
|
申请公布号 |
US2009212018(A1) |
申请公布日期 |
2009.08.27 |
申请号 |
US20080330028 |
申请日期 |
2008.12.08 |
申请人 |
R3T GMBH RAPID REACTIVE RADICALS TECHNOLOGY |
发明人 |
MATHUNI JOSEF |
分类号 |
B44C1/22;B81C99/00 |
主分类号 |
B44C1/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|