发明名称 |
Apparatus and method for measuring surface topography of an object |
摘要 |
An apparatus for measuring surface topography of an object includes an optical arrangement capable of directing a first light beam at a surface of the object, providing a second light beam coherent with and spatially phase-shifted relative to the first light beam, and generating an interference beam from the second light beam and a reflection of the first light beam from the surface of the object. The apparatus further includes at least one line scan sensor for detecting and measuring the interference beam.
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申请公布号 |
US2009213386(A1) |
申请公布日期 |
2009.08.27 |
申请号 |
US20080070844 |
申请日期 |
2008.02.21 |
申请人 |
LEBLANC PHILIP ROBERT;SCHNEIDER VITOR MARINO;TRICE JAMES PATRICK |
发明人 |
LEBLANC PHILIP ROBERT;SCHNEIDER VITOR MARINO;TRICE JAMES PATRICK |
分类号 |
G01B9/02;G01B11/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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