发明名称 SUBSTRATE CARRIER SYSTEM
摘要 A substrate carrier system is provided for physical management of substrate(s) during a variety of assembly techniques performed on the both sides of the substrate(s) without dismounting or changing carrier systems.
申请公布号 US2009214323(A1) 申请公布日期 2009.08.27
申请号 US20080038338 申请日期 2008.02.27
申请人 UNIVERSAL INSTRUMENTS CORPORATION 发明人 HARVILCHUCK LAURENCE A.;WESTBY GEORGE R.
分类号 H01L21/677 主分类号 H01L21/677
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