| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminate with reduced leakage current, and to provide a manufacturing method for the laminate. SOLUTION: The laminate includes a base material, a silica-based insulating portion formed above the base material, a conductive portion formed in the silica-based insulating portion, and a barrier layer formed over the silica-based insulating portion and the conductive portion. The barrier layer contains polycarbosilane. COPYRIGHT: (C)2009,JPO&INPIT
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