DIAMOND UV SENSOR ELEMENT, MANUFACTURING METHOD THEREOF, UV SENSOR, AND DIAMOND SINGLE CRYSTAL PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a diamond UV sensor element with an improved UV light/visible light blind ratio, and to provide a method of manufacturing the element. SOLUTION: A diamond ultraviolet sensor element has a diamond single crystal as a light receiving section and detects light with a change in electrical resistance generated by the light irradiated to this light-receiving section. A method of manufacturing the diamond UV sensor element includes (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen; and (2) a step of forming the light-receiving section by exposing the surface of the hydrogenated diamond single crystal to the atmosphere containing ozone or active oxygen. COPYRIGHT: (C)2009,JPO&INPIT