A HEATER FOR PIPELINE GAS REFINED OF SEMICONDUCTOR FABRICATION

摘要

A heater for refining a gas of a pipeline of a semiconductor facility is provided to prevent a short-circuit when disconnection is generated by overheat of a hot wire by fixing the hot wire of a top part of a substrate sheet of a heater by fixed interval stitching through a sewing line. A hot wire(30) on a substrate sheet(20) of a heater(100) attached on an outer surface of a pipeline(10) is fixed by fixed interval stitching through a sewing line(40). The substrate is formed by laminating insulation sheets(50) of material like the substrate sheet. The sewing line is made of silica thread in which Teflon is coated. The substrate sheet is made of one among glass fiber, silica fiber, and a Teflon sheet in which the glass fiber is mounted. The sewing line includes a glass fiber thread in which the Teflon is coated.