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发明名称
ATOMIC LAYER DEPOSITION ENCAPSULATION
摘要
The invention provides devices that are conformally encapsulated using ALD and methods for producing the same.
申请公布号
WO2009061704(A3)
申请公布日期
2009.08.20
申请号
WO2008US82295
申请日期
2008.11.03
申请人
HCF PARTNERS, L.P.;GOUGH, NEIL;DAMERON, ARRELAINE
发明人
GOUGH, NEIL;DAMERON, ARRELAINE
分类号
H01L21/205;H01L33/44;H01L33/56
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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