GATE VALVE AND FPD MANUFACTURING MACHINE HAVING THE SAME
摘要
A gate valve and an FPD manufacturing device having the same are provided to easily and conveniently release coupling between the gate value and a chamber, thereby easily separating and reassembling two chambers. A valve housing(110) has an expanding and contracting structure. Two chamber are closed adhered to make the inside airtight during expansion. An opening and closing valve(120) regulates connection of two gate slits in the valve housing. A housing body is divided into the first housing located in an upper process chamber(50a) and the second housing located in a transfer chamber(70).