发明名称 GATE VALVE AND FPD MANUFACTURING MACHINE HAVING THE SAME
摘要 A gate valve and an FPD manufacturing device having the same are provided to easily and conveniently release coupling between the gate value and a chamber, thereby easily separating and reassembling two chambers. A valve housing(110) has an expanding and contracting structure. Two chamber are closed adhered to make the inside airtight during expansion. An opening and closing valve(120) regulates connection of two gate slits in the valve housing. A housing body is divided into the first housing located in an upper process chamber(50a) and the second housing located in a transfer chamber(70).
申请公布号 KR20090088738(A) 申请公布日期 2009.08.20
申请号 KR20080014193 申请日期 2008.02.15
申请人 ADP ENGINEERING CO., LTD. 发明人 HA, SU CHUL;PARK, WOO JONG;SONG, HO KEUN
分类号 G02F1/13 主分类号 G02F1/13
代理机构 代理人
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