| 摘要 |
Ultrasonic spray deposition (USD) used to deposit a base layer on the substrate, followed by chemical vapor infiltration (CVI) to introduce a binder phase that creates a composite coating with good adherence of the binder to the initial phase particles and adherence of the composite coating to the substrate, is disclosed. We have used this process to create coatings consisting of cubic boron nitride (cBN), deposited using USD, and titanium nitride (TiN) applied using CVI in various embodiments. This process can be used with many materials not usable with other processes, including nitrides, carbides, carbonitrides, borides, oxides, sulphides and silicides. In addition, other binding or post-deposition treatment processes can be applied as alternatives to CVI, depending on the substrate, the coating materials, and the application requirements of the coating. Coatings can be applied to a variety of substrates including those with complex geometries. The application also describes apparatus or equipment designs used to perform ultrasonic spray deposition. |
