发明名称 SEMICONDUCTOR DEVICE HAVING MOS-TRANSISTOR FORMED ON SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING THEREOF
摘要 A semiconductor device comprises MOS transistors sequentially arranged in the plane direction of a substrate, wherein a gate electrode and a wiring portion for connecting between the gate electrodes to each other are implanted into a layer that is lower than a surface of the substrate in which a diffusion layer has been formed. A first device isolation area with a STI structure for separating the diffusion layers that function as a source/drain area is formed on the surface of the substrate. A second device isolation area with the STI structure for separating channel areas of the MOS transistors adjacent to each other is formed in a layer that is lower than a layer that has the first device isolation area.
申请公布号 US2009200593(A1) 申请公布日期 2009.08.13
申请号 US20090361117 申请日期 2009.01.28
申请人 ELPIDA MEMORY, INC. 发明人 UCHIYAMA HIROYUKI
分类号 H01L27/108;H01L21/762;H01L29/06 主分类号 H01L27/108
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