Micromechanical actuator has swivel plate and mounting plate, in which swivel plate is held in tilted manner around axis, where surface electrode is arranged on electrode carrier surface

摘要

The micromechanical actuator (100) has a swivel plate (102) and a mounting plate, in which the swivel plate is held in a tilted manner around an axis (104). A surface electrode is provided, which is arranged on an electrode carrier surface. The swivel plate has a reflected surface (114). An independent claim is included for a method for manufacturing micromechanical actuator.