| 摘要 |
PROBLEM TO BE SOLVED: To provide an etchant suitable for etching a layer, containing titanium as a main constituent within a layered product including the layer, containing titanium as a main constituent and a layer containing aluminum as a main constituent, and a layer containing aluminum as a main constituent, and to provide an etching method. SOLUTION: This etchant contains hydrosilicofluoric acid, water and hydrosilicofluoric acid salt. This method is used for collectively etching a layered product including a layer, containing titanium as the main constituent and a layer containing aluminum as the main constituent by the etchant containing hydrosilicofluoric acid, water and hydrosilicofluoric acid salt. The method is also used for etching by the etchant containing hydrosilicofluoric acid, water and hydrosilicofluoric acid salt, a layer containing titanium as the main constituent within a layered product including the layer containing titanium as the main constituent and a layer containing aluminum as the main constituent, and a layer containing aluminum as the main constituent at the same time. COPYRIGHT: (C)2009,JPO&INPIT
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