| 摘要 |
<p>A liquid processing device has a first supply source (52) for supplying a first processing fluid, and a second supply source (53) for supplying a second processing fluid. A discharge opening (27) for supplying a mixed fluid produced at a mixing section (26) is connected to first processing fluid supply paths (62u, 62l) and to a second processing fluid supply path (63). A flow rate regulation valve (10) is provided on the downstream of an on/off valve (20) provided in the first processing fluid supply path (62u). The flow rate regulation valve (10) is connected to a valve driving fluid supply section (51), and the on/off speed is regulated by cooperation between the valve driving fluid and the first processing fluid.</p> |
