发明名称 ARRAY AND CANTILEVER ARRAY LEVELING
摘要 Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.
申请公布号 CA2714005(A1) 申请公布日期 2009.08.13
申请号 CA20092714005 申请日期 2009.02.05
申请人 NANOINK, INC. 发明人 HAAHEIM, JASON;VAL-KHVALABOV, VADIM
分类号 G01Q60/24;G03F7/00;G03F9/00 主分类号 G01Q60/24
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