THIN FILM FORMING METHOD AND COLOR FILTER MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a high quality thin film having uniform thickness by controlling the size of a reception part to which droplets are discharged in accordance with the droplet discharge quantity from a discharge nozzle. SOLUTION: The film forming method includes: a step of obtaining the measured value of the discharge quantity of a liquid body L from a plurality of discharge nozzles 160; a step of providing partitions 181 around each predetermined area 184 to form a plurality of the reception parts 182; and a step of forming the thin film 183 by arranging the liquid body into the plurality of the correspondent reception part 182 from the plurality of the discharge nozzle 160. In the step of forming the reception part 182, the measured values concerned in respective discharge nozzles 160 are compared and the plane view surface area of the reception part 182 corresponding to the discharge nozzle 160 exhibiting relatively large measured value is formed to be smaller than that of the reception part 182 corresponding to the discharge nozzle 160 exhibiting relatively small measured value. COPYRIGHT: (C)2009,JPO&INPIT