| 发明名称 |
SYSTEM AND METHODS FOR CONSERVATION OF EXHAUST HEAT ENERGY |
| 摘要 |
<p>Methods, apparatus and systems are provided for conserving energy in an electronic device manufacturing facility. In one aspect an electronic device manufacturing system is provided including one or more process chambers; one or more abatement tools; two or more effluent conduits connecting the one or more process chambers to the one or more abatement tools; a channel adapted to house a portion of at least two of the two or more effluent conduits; and one or more heating elements adapted to heat the two or more conduits within the channel.</p> |
| 申请公布号 |
WO2009100083(A2) |
申请公布日期 |
2009.08.13 |
| 申请号 |
WO2009US32992 |
申请日期 |
2009.02.03 |
| 申请人 |
APPLIED MATERIALS, INC.;CHANDLER, PHIL |
发明人 |
CHANDLER, PHIL |
| 分类号 |
H01L21/02;H01L21/00 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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