,申请号JP20040030911-传众专利搜索

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发明名称
摘要
申请公布号	JP4311217(B2)	申请公布日期	2009.08.12
申请号	JP20040030911	申请日期	2004.02.06
申请人		发明人
分类号	C30B29/36;H01L21/205;C23C16/42	主分类号	C30B29/36
代理机构		代理人
主权项
地址

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