| 摘要 |
PROBLEM TO BE SOLVED: To provide a boundary elastic wave device, capable of effectively suppressing a spurious state caused by an elastic wave confined between a boundary surface on which an elastic boundary waves propagates and the surface of a medium layer, and to provide proper resonance characteristics and filter characteristics. SOLUTION: In this elastic boundary wave device 1, on the boundary between an LiNbO<SB>3</SB>substrate as a first medium layer 2, having a relatively high sound velocity and an SiO<SB>2</SB>film as a second medium layer 3, having a relatively low sound velocity, an IDT 4 as an electroacoustic transducer and reflectors 5 and 6 are arranged, and recessed parts and/or projecting parts are provided on the upper surface of the SiO<SB>2</SB>film, by forming a plurality of grooves 3b. COPYRIGHT: (C)2009,JPO&INPIT
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