GAS BURNER

摘要

A gas burner, which is suited particularly for the flame treatment of large substrate surfaces, for example for coating such surfaces in a combustion chemical vapor deposition (CCVD) process, comprises a burner body (1) having a gas feed connection (2) and a nozzle plate (3), wherein the burner body (1) and the nozzle plate (3) together form a gas plenum, and the nozzle plat (3) forms a perforated wall region of the gas plenum. The nozzle plate (3) has a large number of nozzles (4), which extend from a plenum side (5) to a flame side (6) of the nozzle plate (3), and is made of a plurality of metal sheets (10), which are arranged in a stack and run substantially perpendicular or substantially parallel to the nozzle direction. The metal sheets (10) have continuous openings, wherein at least some of the continuous openings of all metal sheets are oriented relative to each other, or they have a comb-like shape. The nozzle plate (3) of the burner can be produced with little effort, for example from commercially available metal perforated plate, regardless of the burner size and the required ratio between the lengths and diameters of the nozzles. It can also be easily adapted to different requirements with respect to the nozzle size or density, and it can be cleaned with little effort.