| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that the detection of the foreign matter adhered to the back of a glass substrate is difficult by a conventional method for detecting the foreign matter by irradiating the glass substrate, which forms a flat display, with a laser beam and observing the scattered beam from the surface of the glass substrate. SOLUTION: This foreign matter detector is provided with a work stand 4, which has a suction function, having an inspection target such as the glass substrate 1 or the like mounted thereon, a laser beam source 2 for emitting a laser beam almost in parallel to the surface of the inspection target to irradiate the surface of the inspection target, and a light receiver 3 for observing the spot shape of the laser beam. The foreign matter 10 adhered to or present on the back of the inspection target is detected by a change in the spot shape of the laser beam. COPYRIGHT: (C)2009,JPO&INPIT
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