| 摘要 |
<p>The invention provides a highly accurate and inexpensive electromagnetic induction type encoder capable of acquiring strong signal intensity with the offset reduced by a short scale coil, and is durable against fluctuations in the yaw direction, which includes a number of scale coils 14 arrayed on a scale 10 along the measurement direction, and transmitting coils 24 and receiving coils 20 that are disposed on a grid 12 relatively movably in the measurement direction with respect to the scale, and which detects a relative movement amount of the scale and the grid from changes in magnetic fluxes detected by the receiving coils via the scale coil when the transmitting coils are magnetized, wherein a plurality of sets of the transmitting coils (24A, 24B), the receiving coils (20A, 20B) and the scale coils (14A, 14B) are disposed symmetrically with respect to the center of the scale, and scale coils of one set located at a symmetrical position around the center of the scale is disposed with 1/2 phase of the scale pitch shifted with respect to scale coils of the other set.</p> |
