MANUFACTURING METHOD OF FIELD EMITTER IMPROVED IN ELECTRON EMISSION CHARACTERISTIC

摘要

A method of manufacturing field emitter to improve electron emission is provided to improve the electron emission property of the display device by performing the thermal process and solution process or the solution process and thermal process on the carbon nanotube. The method of manufacturing the field emitter comprises 7 steps. The first step is performed in order to form the field emitter on the substrate(100). The field emitter has the emitter consisting of the carbon nanotube(140). The second step is performed in order to put substrate into the heating tool. The third step is performed in order to gradually increase the temperature of the heating tool to the intended temperature. The fourth stage is performed to maintain the heating tool in the intended temperature. The fifth step is performed in order to take out substrate of the heating tool and perform the natural cooling. The sixth step is performed in order to dip substrate into the HF solution. The seventh step is performed in order to take out substrate of the HF solution and dry the substrate.