发明名称 MOLDING APPARATUS FOR MEASURING SHEET RESISTANCE OF ORGANIC/INORGANIC MATERIALS POWDER OR SOLUTION
摘要 A molding apparatus for measuring sheet resistance of organic/inorganic materials powder or solution is provided to easily measuring the sheet resistance of pellet while manufacturing the pellet without damage. The upper plate(30) comprises the presser portion(40) compressing a sample. The material molding material(60) comprises the part(50) for the number of ingredient of the fixed space which is positioned at the lower part of the cover plate, and can accommodate the presser portion. The bottom plate(70) is positioned at the lower part of the material molding material, and has the probe(90) for contacting the sample. The sheet resistance measuring unit(100) is electrically connected to the probe. The probe fixing unit is mounted on the bottom plate to support the probe.
申请公布号 KR20090083576(A) 申请公布日期 2009.08.04
申请号 KR20080009455 申请日期 2008.01.30
申请人 INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY 发明人 LEE, SANG YUP;KIM, JONG HAK;CHO, JU YOUNG;DONG, HYUN BAE
分类号 H01L21/66 主分类号 H01L21/66
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