| 摘要 |
PROBLEM TO BE SOLVED: To inhibit a ceramics member from being contaminated by diffusion of boron from a graphite member of a high-temperature furnace during high-temperature heat treatment while suppressing effects on an environment by a simple method and simple equipment. SOLUTION: First, a crucible filled with high-purity silicon is introduced into a high-temperature furnace, and the crucible is heated to a temperature exceeding a melting point of silicon so as to convert the surface layer part of a graphite member in the high-temperature furnace into silicon carbide. Next, a silicon carbide sintered body is introduced into the high-temperature furnace and the silicon carbide sintered body is subjected to high-temperature heat treatment at a temperature near the sintering start temperature so as to purify the silicon carbide sintered body. COPYRIGHT: (C)2009,JPO&INPIT |
