| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting apparatus which can prevent the wobbling of wiring connected to a second Z-driving source and piping connected to a suction nozzle. SOLUTION: An inverting pickup unit 15 of the mounting apparatus is equipped with a base 18 driven in the horizontal direction; a Z table 23 provided on the base so as to be driven in the vertical direction; a rotationally driving mechanism 32 provided on the Z table in such a manner that the rotational axis line of the output shaft 36 thereof may be perpendicular to the plane surface of the Z table; the suction nozzle 16 which is provided at the tip of the output shaft so as to be driven in the vertical direction perpendicular to the rotational axis line and which, after picking up a semiconductor chip, is rotationally driven together with the output shaft to inverse the semiconductor chip; and a second bracket 54 having a bearing which has its one end connected to the second Z-driving source and the suction nozzle and the other end rotationally supporting halfway portions of wiring 47 and piping 48 led out on the base side and which prevents the deformation of the wiring and piping in a direction of going away from the plane surface of the Z table when the suction nozzle is rotationally driven. COPYRIGHT: (C)2009,JPO&INPIT
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