| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical integrated element which is suppressed in bending propagation loss of a high mesa waveguide in basic mode, and a manufacturing method of the optical integrated element. SOLUTION: The optical integrated element comprises a substrate and a waveguide extended along a substrate surface while projecting on the substrate and having a lower clad layer, a core layer formed on the lower clad layer and having a larger refractive index than the lower clad layer, and an upper clad layer formed on the core layer and having a smaller refractive index than the core layer, wherein the waveguide includes a linear waveguide portion and a bent waveguide portion having curvature in a plane parallel to the surface of the substrate, the projection height of the lower clad layer from the substrate being larger at the bent waveguide portion than at the linear waveguide portion. COPYRIGHT: (C)2009,JPO&INPIT |
