发明名称 |
LARGE AREA INTEGRATION OF QUARTZ RESONATORS WITH ELECTRONICS |
摘要 |
Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer bonding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.
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申请公布号 |
US2009189294(A1) |
申请公布日期 |
2009.07.30 |
申请号 |
US20090399680 |
申请日期 |
2009.03.06 |
申请人 |
HRL LABORATORIES, LLC |
发明人 |
CHANG DAVID T.;KUBENA RANDALL L. |
分类号 |
H01L27/20;H01L21/673;H01L41/22;H04R31/00 |
主分类号 |
H01L27/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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