| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact flow sensor that is miniaturized and achieve sufficient response speed. <P>SOLUTION: The flow sensor 30 is incorporated into a catheter 11. The flow sensor 30 includes a heater 32 formed on a film-shaped substrate 31 and an electric wire 34 for feeding electric power to the heater 32. The film-shaped substrate 31 is arranged so that it follows the inner wall of the catheter 11. In order to achieve the thermal insulation of the heater 32 formed on the film-shaped substrate 31, a cavity 33 for thermal insulation is formed on the periphery of the heater 32. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
