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发明名称
摘要
申请公布号	JP4303058(B2)	申请公布日期	2009.07.29
申请号	JP20030288199	申请日期	2003.08.06
申请人		发明人
分类号	H01L21/28;H01L21/768;H01L21/60;H01L21/8242;H01L27/108	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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