| 摘要 |
<p>The present invention relates to an antireflective coating composition comprising, (i) a thermal acid generator; (ii) a crosslinkable polymer comprising at least one aromatic group; and, (iii) a polymeric crosslinker comprising at least one unit of structure (6), where R11 to R13 is independently selected from H, (C1-C6) alkyl and aromatic group, R14 and R15 are independently (C1-C10) alkyl. The invention also relates to a process for imaging the antireflective coating composition of the present invention.</p> |
| 申请人 |
AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
KIM, WOOKYU;WU, HENGPENG;ABDALLAH, DAVID J.;NEISSER, MARK;LU, PINGHUNG;ZHANG, RUZHI;RAHMAN, M., DALIL |
