| 摘要 |
An object of the present invention is to provide a vacuum pump in which the corrosion resistance to a corrosive gas and the heat releas ing property of a heated component are improved. In a rotor 11 incorporated in a pump case 1 of a vacuum pump P, there is provided a surface treatment layer 42 in which a nickel alloy layer 43 is formed by applying nickel with high corrosion resistance onto a base material 41 made of an aluminum alloy and a nickel oxide 44 with high emissivity is formed on the surface of the nickel alloy layer 43 by oxidizing nickel. |
