发明名称 |
Lithographic apparatus having parts with a coated film adhered thereto |
摘要 |
A lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure.
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申请公布号 |
US7561250(B2) |
申请公布日期 |
2009.07.14 |
申请号 |
US20070812507 |
申请日期 |
2007.06.19 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LIEBREGTS PAULUS MARTINUS MARIA;FIEN MENNO;LOOPSTRA ERIK ROELOF;VAN DER HAM RONALD;SIMONS WILHELMUS FRANCISCUS JOHANNES;DIRECKS DANIEL JOZEF MARIA;JANSSEN FRANCISCUS JOHANNES JOSEPH;BRANDS GERT-JAN GERARDUS JOHANNES THOMAS;STEFFENS KOEN |
分类号 |
G03B27/42;G03B27/32;G03B27/52;G03B27/58 |
主分类号 |
G03B27/42 |
代理机构 |
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地址 |
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