| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film-forming method which makes the thickness of a thin film uniform when a solution is jetted and applied to form the thin film. <P>SOLUTION: In the film-forming method, a solution is jetted and applied to a substrate, with dots whose diameters are smaller than the intervals between nozzles adjacent to each other, from a plurality of nozzles formed at prescribed intervals in a prescribed direction on a head. In this case, the method is provided with: a process in which the solution is jetted, with the dots, to the substrate from each of the nozzles; and a process in which the head and the substrate are relatively moved in the prescribed direction, and the part between a pair of dots, which is first jetted to the substrate from a pair of nozzles of prescribed interval, is completely painted with a plurality of dots. The part between the pair of dots, which is first jetted at a prescribed interval to the substrate, is completely painted with a plurality of dots in order in which the first jetted and applied dot is not adjacent to the last jetted and applied dot. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
