| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily separate a reticle from a pellicle. <P>SOLUTION: A reticle cassette 4 is composed of two pieces of plate members 9, 10. A hollowed portion 9h with a shape allowing a reticle 2 to be inserted into the plate member 9 is formed, while another hollowed portion 10h having a shape being slightly larger than that of the resist 7 of the reticle 2 is formed on the plate member 10. Thus, recessed portions are formed in the plate 9 and the plate 10. A pellicle frame 8 is disposed in the circumference of the hollowed portion 10h, and a protective film 3f is formed in a stretched manner over the pellicle frame 8. The reticle 2 is housed in the recessed portion with the resist 7 of the reticle 2 directed toward the hollowed portion 10h. The resist 7 is put in sealed space. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
