发明名称 |
PROCESSING APPARATUS, ELECTRON EMITTING ELEMENT AND METHOD FOR MANUFACTURING ORGANIC EL DISPLAY |
摘要 |
Highly accurate batch pattern film formation is made possible even when using a mask, which has a possibility of deteriorating pattern alignment accuracy due to heavy weight as a result of meeting the requirement of size increase of a subject to be processed. Specifically, a processing apparatus (1), which performs processing by fixing a subject (300) to be processed and a mask (200), is provided with a base (400) for placing the subject (300) and the mask (200). Furthermore, the processing apparatus is provided with a second fixing means (101), which includes a permanent magnet for fixing a mask frame (200a) of the mask (200) on the base (400). The processing apparatus is also provided with a first fixing means (102), which includes a permanent magnet for fixing a mask-film-like flat surface (200b) of the mask (200) on the base (400). The second fixing means (101) and the first fixing means (102a, 102b) respectively have mechanisms wherein each permanent magnet can move the base (400) in the vertical direction. |
申请公布号 |
WO2009084623(A1) |
申请公布日期 |
2009.07.09 |
申请号 |
WO2008JP73704 |
申请日期 |
2008.12.26 |
申请人 |
CANON ANELVA CORPORATION;INOUE, MASATO;MATSUI, SHIN;HIMEJI, TOSHIAKI |
发明人 |
INOUE, MASATO;MATSUI, SHIN;HIMEJI, TOSHIAKI |
分类号 |
C23C14/04;C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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