AIR-GAP ILD WITH UNLANDED VIAS,申请号WO2008US84680-传众专利搜索

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发明名称	AIR-GAP ILD WITH UNLANDED VIAS
摘要	<p>A spacer is adjacent to a conductive line. Vias that do not completely land on the conductive line land on the spacer and do not punch through into a volume below the spacer.</p>
申请公布号	WO2009085506(A1)	申请公布日期	2009.07.09
申请号	WO2008US84680	申请日期	2008.11.25
申请人	INTEL CORPORATION;BALAKRISHNAN, SRIDHAR;BOYANOV, BOYAN	发明人	BALAKRISHNAN, SRIDHAR;BOYANOV, BOYAN
分类号	H01L21/3205;H01L21/31;H01L21/4763	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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