| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro machine device in which two material layers opposed to each other through a space do not adhere to each other and a manufacturing method thereof. SOLUTION: The micro machine device includes a substrate 10, a first material layer 12 provided on the surface of the substrate and a second material layer 16 supported by a sacrifice layer 14 through the space from the first material layer 12. At least one protruding part 22 is provided on the surface of the second material layer opposed to the first material layer. A material of the protruding part is different from that of the first material layer and the second material layer. The sacrifice layer 14 is etched by a reactive ion etching to reduce its thickness. Further, a wet etching is continuously carried out to form the space and leave the protruding part, so that the protruding part is formed. COPYRIGHT: (C)2009,JPO&INPIT
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