3D MEASUREMENT APPARATUS USING DIGITAL HOLOGRAPHY

摘要

A 3D measurement system using digital holography is provided to improve measuring speed and lateral resolution and to minimize the test space for reflective sample. A 3D measurement system using digital holography comprises a first wave plate(30) which performs right-hand circular polarization of the beam linearly polarized by 45°, a beam separation/composition unit(20) dividing the polarized beam into a reference beam and a measurement beam, a second wave plate(31) making the reference beam of P-type waveform and the reference beam of S-type waveform with a phase difference of 90° incident to the beam separation/composition unit, a first polarizer(32) making the measurement beam of P-type waveform and the measurement beam of S-type waveform with a phase difference of 0° incident to the beam separation/composition unit, and interference beam separation units(40) separating an interference beam from the beam separation/composition unit into first and second interference beam.