| 摘要 |
A machine diagnosing device 20 includes a drive object driving force estimating unit 21 for estimating drive object driving force based on a torque command value toward a servo motor 3 which is acquired using a position command value, an elastic deformation error estimating unit 23 for estimating an elastic deformation error of a ball screw 4 with the drive object driving force, and a positional deviation calculating unit 22 for calculating a positional deviation using a rotation position of the servo motor 3 and the position of a table 2, and a machine damage diagnosing unit 24 for diagnosing a machine damage by calculating a machine damage coefficient using the elastic deformation error and the positional deviation, comparing the obtained machine damage coefficient with a previously set threshold value, and diagnosing a damage state of the drive object.
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