| 摘要 |
A loadlock chamber is provided to recognize a position of a first wafer or a second wafer by forming a sensor part in at least one among a first loading stand and a second loading stand. A first loading stand(531a,531b) is formed inside a chamber. A first wafer(W1) is loaded on the first loading stand. A second loading stand(532b) is arranged in a bottom part of the first loading part. A second wafer(W2) is loaded on the second loading stand. A sensor part(521a,521b,521c,522a,522b,522c) is formed in at least one among the first loading stand and the second loading stand, and recognizes a position of the first wafer or the second wafer. The sensor part is at least three or more photo sensors which are adjacent to a circumference of the first wafer or the second wafer.
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