| 摘要 |
A chucking member, a manufacturing method thereof, and a substrate processing device having the same are provided to simplify a manufacturing process of the chucking member and to supply the fluid to the substrate uniformly by forming an upper plate of the chucking member made of a multi perforate material. A chucking member includes a lower plate(121) and an upper plate(123). A flow path is formed in the lower plate for controlling a temperature. The substrate is received in the substrate. The upper plate is made of a multi perforate material to supply the fluid to the substrate. The pore of the upper plate is larger than the particle of the fluid.
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