发明名称 DUAL STRESS DEVICE AND METHOD
摘要 A semiconductor device (80,85) including semiconductor material (35,40) having a bend and a trench feature formed at the bend, and a gate structure (45,50) at least partially disposed in the trench feature. A method of fabricating a semiconductor structure including forming a semiconductor material with a trench feature over a layer, forming a gate structure at least partially in the trench feature, and bending the semiconductor material such that stress is induced in the semiconductor material in an inversion channel region of the gate structure.
申请公布号 KR20090069301(A) 申请公布日期 2009.06.30
申请号 KR20097007895 申请日期 2009.04.17
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ANDERSON BRENT A.;BRYANT ANDRES;NOWAK EDWARD J.
分类号 H01L21/8238 主分类号 H01L21/8238
代理机构 代理人
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