| 摘要 |
<p>An exposure apparatus having an automatic temperature control device and a method for controlling automatically the temperature thereof are provided to control automatically temperature of a projection lens by measuring automatically pressure of a refrigerant and supplying the refrigerant on the basis of the measured pressure. An exposure apparatus having an automatic temperature control device includes a pressure sensor(60), a center processing unit(70), and a control unit. The pressure sensor is installed at one side of an inside of a housing(40) of a projection lens in order to sense pressure of a refrigerant(21) and to convert the sensed pressure to an electrical signal. The central processing unit is installed at the outside of the housing of the projection lens. The central processing unit is electrically connected with the pressure sensor in order to compare a reference value stored in a database(80) and the pressure of the refrigerant of the housing. The controller controls the exposure apparatus and a valve(50) on the compared result.</p> |
