| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of taking the exhaust air from a clean room and the like used in a process of manufacturing an electronic apparatus, a precision apparatus and the like, purifying the exhaust air by removing molecular contaminants and particulate contaminants, and continuously circulating and supplying the same to the clean room and the like for a long period. <P>SOLUTION: When the exhaust air is taken from a clean work space as the process air, and the temperature/humidity conditioned air of high purity is prepared by removing the particulate contaminants and molecular contaminants from the process air to be circulated and supplied to the clean work space, the process air is taken in a humidification cooling/heating device, and passed to a batch-wise temperature swing adsorbing device using the air taken from the inside or outside of a room as the regenerated air, to remove the particulate contaminants and molecular contaminants and to condition the temperature and humidity. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
