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发明名称
Apparatus for transfering substrate
摘要
申请公布号
KR100904532(B1)
申请公布日期
2009.06.25
申请号
KR20070120424
申请日期
2007.11.23
申请人
发明人
分类号
H01L21/677;H01L21/683
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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