| 摘要 |
A semiconductor manufacturing apparatus and a cassette transferring method thereof are provided to increase productivity by reducing or minimizing a transferring standby time of a second cassette to be transferred from a stoker to a load/unload port. A semiconductor manufacturing apparatus includes a unit process device(110), a load/unload port(140), a stoker, an automatic transferring unit(130), and a temporary buffering unit(150). The unit process device performs unit processes of wafers. The load/unload port outputs a first cassette(112) for storing the processed wafers. The stoker stores a second cassette to be loaded into the unit process device through the load/unload port. The automatic transferring unit transfers the first and second cassettes between the stocker and the load/unload ports of the unit process device. The temporary buffering unit maintains a waiting state of the first cassette in order to transfer the second cassette by the automatic transferring unit. The processed wafers are loaded into the first cassette.
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