| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt calibrating method of a micro-interferometer clamp section and a tool for tilt calibration that easily calibrates the tilt of the clamp section of each manufactured micro-interferometer and establishes the traceability system related to the tilt adjusting accuracy of the clamp section. SOLUTION: A standard micro-interferometer 10 where the tilt of the clamp section 20 is calibrated using a reference ferrule 41 measures the top eccentric amount of the tip surface 54 of a sub-reference ferrule 50, and the measured value is provided as an intrinsic top eccentric amount to the sub-reference ferrule 50. Next, using the sub-reference ferrule 51 provided with the value of the intrinsic top eccentric amount, the displacement amount between a pseudo top and the center point of the tip surface 54 is measured, and the tilt of the clamp section 20A of a micro-interferometer 10A to be calibrated is calibrated based on the difference between the displacement amount and the intrinsic top eccentric amount. COPYRIGHT: (C)2009,JPO&INPIT
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