THIN FILM LAMINATED BODY, THIN FILM MAGNETIC SENSOR USING THE THIN FILM LAMINATED BODY AND METHOD FOR MANUFACTURING THE THIN FILM LAMINATED BODY

摘要

Provided is a thin film laminated body to have a thin film conductive layer having high electron mobility and sheet resistance as an InAsSb operation layer. A thin film magnetic sensor using such thin film laminated body and a method for manufacturing such thin film laminated body are also provided. The thin film laminated body is provided with an AlXIn1-XSb mixed crystal layer arranged on a substrate, and an InAsXSb1-X (0XIn1-XSb layer by being brought into direct contact with the layer. The AlXIn1-XSb mixed crystal layer exhibits resistance higher than that of the InAsXSb1-X thin film conductive layer or insulating characteristics or p-type conductivity, a band gap larger than that of the InAsXSb1-X thin film conducive layer and a lattice mismatch within a range of +1.3% to -0.8%.