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发明名称
METHOD OF FORMING MULTILAYER REFLECTIVE EXTREME ULTRAVIOLET LITHOGRAPHY MASK BLANKS
摘要
申请公布号
EP1660941(B1)
申请公布日期
2009.06.24
申请号
EP20040778644
申请日期
2004.07.16
申请人
INTEL CORPORATION
发明人
YAN, PEI-YANG
分类号
G03F7/16;G03F1/14
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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