| 摘要 |
A micro-gas sensor and a manufacturing method thereof are provided to form various materials to a gas sensitive membrane easily, and to offer various properties such as rapid heating and cooling speed, strong durability and high sensitivity etc. A micro-gas sensor includes a substrate(101), an electrode pad separating groove(114), a plurality of electrode pads(112), a micro heater(106), a plurality of sensing electrodes(107,108,109), and a gas sensitive membrane(113). The electrode pad separating groove is formed on the top of the substrate. The electrode pad is formed on the top of the substrate. The electrode pad is mutually insulated with the electrode pad separating groove. A micro heater is connected to a plurality of electrode pads with bride structure. The gas sensitive membrane contacts with the micro heater and surfaces of the sensing electrodes. The sensitive membrane is formed between the sensing electrodes and microgaps(110) of the sensing electrodes. |
